1. Ceramic Z axis
2. German team R&D
3. High accuracy:MPEe From 0.65+L/500um
Main Box Size
Main Box Weight
Accessory Box Size
Accessory Box Weight
1. Using ANSYS finite element algorithm of three axis recent guide rail, precision design optimization, rectangular beams and closed frame structure design of the X axis and Z axis is using all sides surrounded by static pressure type air bearing structure and organ type dustproof design and technical characteristics, the whole machine of the application of new materials and NANO technology patent new technology and structure;
2. The mechanical overall structure adopts strong rigidity, light weight and close frame movable bridge structure, which is simple, compact and has strong loaded capacity and good moving performance.
3. Y-axis guide-way adopts dove tail type, which has high precision and good stability.
4.Drive system adopts unique patent (Patent NO. ZL 2014 2 0529248.2) wire transmission, which Guarantee the drive’s fastness, precision and perfect movement.
5. Z axis adopts ceramic material, high strength sintered ceramic material with high strength, high surface finish
6.Three axis' adoption of quiescent air pressure air-bearing guide way, comprised of air bearings which are self-cleaning, pre-loading and high precision.
7. Using imported RTLC + TONIC combination as a length measurement datum, the standard of 50 nm ultra-high resolution to provide reliable measurement benchmark.
8.Transmission adopt international famous brand AMETEK PITTMAN, M series as the DC servo motor speed loop drive unit.
9. Software provides a powerful platform to develop and run test procedure.
10. Triaxial guide work adopts RENISHAW six linear compensation unit and two work-piece compensation unit, ensure the accuracy and reliability of real-time compensation, greatly reduces the limitations of measuring the required environment;